Processing Equipment

• Unaxis ICP Etcher
• CHA Electron beam evaporator
• Plasma Therm Plasma enhanced chemical vapor deposition
• Plasma Therm Reactive ion etching
• Optical lithography
• K&S 4523 Wire Bonder
• R&D Automation Flip-Chip Bonder
• Technics 800-II Micro-RIE
• Ozone Generator
• AG Association 610 RTA
• Tencor Alpha-Step 500 Surface Profiler
• AutoEL Ellipsometer

Testing Equipment

• HP4145A parameter analyzer
• HP4145B parameter analyzer
• HP4156C parameter analyzer
• HP4284 LC meter
• HP4140 pA meter
• Textronics 370A Curve Tracer
• HP8144A Pulse Generator
• HP Infinium Oscilloscope
• Veeco Four Point Probe
• Cascade Probe Station
• Glassman High Voltage Sources(up to 20KV)
• Murry Load-Pull system(MT 983A)
• HP6625 Bias Supply
• Giga-Tronics 12720A Microwave synthesizer
• Giga-Tronics 8625A Power Meter
• HP8722C network analyzer
• HP8722C network analyzer
• HP 70952B Optical Spectrumeter Analyzer