Laboratory Equipment


Processing Equipment

  • Unaxis ICP Etcher
  • CHA Electron beam evaporator
  • Plasma Therm Plasma enhanced chemical vapor deposition
  • Plasma Therm Reactive ion etching
  • Optical lithography
  • K&S 4523 Wire Bonder
  • R&D Automation Flip-Chip Bonder
  • Technics 800-II Micro-RIE
  • Ozone Generator
  • AG Association 610 RTA
  • Tencor Alpha-Step 500 Surface Profiler
  • AutoEL Ellipsometer

Testing Equipment

  • HP4145A parameter analyzer
  • HP4145B parameter analyzer
  • HP4156C parameter analyzer
  • HP4284 LC meter
  • HP4140 pA meter
  • Textronics 370A Curve Tracer
  • HP8144A Pulse Generator
  • HP Infinium Oscilloscope
  • Veeco Four Point Probe
  • Cascade Probe Station
  • Glassman High Voltage Sources(up to 20KV)
  • Murry Load-Pull system(MT 983A)
  • HP6625 Bias Supply
  • Giga-Tronics 12720A Microwave synthesizer
  • Giga-Tronics 8625A Power Meter
  • HP8722C network analyzer
  • HP8722C network analyzer
  • HP 70952B Optical Spectrumeter Analyzer


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